Continuous roller transfer-printing and automated metrology of >75,000 micro-LED pixels in a single shot

A continuous, single shot roller transfer printing process is presented for the large-scale hybrid integration of semiconductor devices. Transfer a 320 × 240 pixel micro-LED array, representing >75,000 individual devices in with sub-micron relative position accuracy demonstrated. The preserves array geometry spatial location error less than 1 µm deviation from as-designed layout. An automated precision metrology system based on simple optical microscopy was developed to asses such large device populations and allow assessment yield.